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  • Deep UV - 193nm Coating

Deep UV - 193nm Coating

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Key Benefits:

All excimer wavelengths: 193nm, 248nm, 308nm, 353nm

High damage threshold

Long lifetime

Wide variety of coatings available

 

Key applications:

Excimer laser optics

Eye vision correction systems(LASIK)

Semiconductor wafer inspection and metrology system

Materials processing applications